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GASES

Supply of special gas and
general industrial gas of the
semiconductor industry

Disilane - Si₂H₆

Description

CAS No. 1590-87-0

Applications

Semiconductor Gas

Paramerter Spec Detection Limit Analysis Measured Value Unit Measurement Type
Cylinder Pressure 33 PSIG Vapour
Chemical Purity 99.998 99.998 >99.998 By Difference % Vapour
Chlorosilanes 0.2 0.2 ND < 0.2 Validation PPMV Vapour
CO 1 0.1 ND < 0.1 GC PPMV Vapour
CO₂ 1 0.1 ND < 0.1 GC PPMV Vapour
Hydrogen 200 0.1 0.5 GC PPMV Vapour
Water 1 0.5 ND < 0.5 Hygrometer PPMV Vapour
Higher Silanes 50 5 0.1 GC PPMV Vapour
Nitrogen 1 0.1 ND < 0.1 GC PPMV Vapour
O₂ + Ar 1 0.1 ND < 0.1 GC PPMV Vapour
Silane 1000 5 11 GC PPMV Vapour
Siloxanes 5 5 ND < 5 GC PPMV Vapour
THC as CH₄ 1 0.1 ND < 0.1 GC PPMV Vapour
Requested Net Weight 10 KG
Actual Net Weight 10088.7 GM