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GASES

Supply of special gas and
general industrial gas of the
semiconductor industry

NF3

Description

CAS No. 7783-54-2

Applications

Semiconductor Gas

Characteristic Specification Value Analysis Unit Measurement Type Measurement  Phase
Purity 99.999 > 99.999 9 v/v% -- --
O2 +Ar 0.5 0.1 ppmv GC Vapor
N2 0.5 0.2 ppmv GC Vapor
CF4 20 0.5 ppmv GC Vapor
N2O 0.5 0.5 ppmv FT-IR Vapor
CO2 0.5 0.1 ppmv FT-IR Vapor
Acidity 0.5 0.5 ppmv FT-IR Vapor
H2O 0.5 0.1 ppmv Moisture Analyzer Vapor
CO 0.5 0.2 ppmv FT-IR Vapor
SF6 0.5 0.2 ppmv GC Vapor
C2F6 1 0.5 ppmv GC Vapor
THC 1 0.5 ppmv GC Vapor
Al 5 0.3 ppb ICP-MS Vapor
As 5 1 ppb ICP-MS Vapor
Ca 5 0.3 ppb ICP-MS Vapor
Co 5 0.1 ppb ICP-MS Vapor
Cr 5 0.1 ppb ICP-MS Vapor
Cu 5 0.1 ppb ICP-MS Vapor
Fe 5 0.2 ppb ICP-MS Vapor
K 5 0.3 ppb ICP-MS Vapor
Mg 5 0.3 ppb ICP-MS Vapor
Mn 5 0.1 ppb ICP-MS Vapor
Mo 5 0.1 ppb ICP-MS Vapor
Na 5 0.4 ppb ICP-MS Vapor
Ni 5 0.1 ppb ICP-MS Vapor
Pb 5 0.1 ppb ICP-MS Vapor
Ti 5 0.1 ppb ICP-MS Vapor
Zn 5 0.2 ppb ICP-MS Vapor