GASES

Supply of special gas and
general industrial gas of the
semiconductor industry

Perfluoropropane - Octafluoropropane - C₃F₈

Description

Halocarbon 218 (Perfluoropropane) (C3F8) is a colorless, nonflammable,
nontoxic gas which is relatively stable and has a faintly sweet odor.
Halocarbon 218 is shipped as a liquefied gas under its Own Vapour pressure
(100 psig @ 70˚F)

Applications

Halocarbon 218 is used for plasma etching. The chemical composition of Halocarbon
218 supplies a higher ratio of Fluorine to Carbon than any Of the other Halocarbon
gases supplied by Electronic Fluorocarbons LLC.When Halocarbon 218 is exposed to
the RF field generated in the etch process, a gas plasma is produced that will etch
Silicon Dioxide or Silicon Nitrite with exellent selectivity.

Constituent concentration		Specification	Actual	LDL's
1, 3 Hexafluorobutadiene	C₄F₆	99.99%	≥ 99.99%	LDL's
Nitrogen	N₂	< 40 ppmv	29.2 ppmv	< 0.5 ppmv
Oxygen, Argon	O₂, Ar	< 10 ppmv	7.3 ppmv	< 0.5 ppmv
Moisture	H₂O	< 20 ppmv	3.4 ppmv	< 0.2 ppmv
Carbon Dioxide	CO₂	< 20 ppmv	< 1.1 ppmv	< 0.5 ppmv
Other Fluorocarbons		< 200 ppmv	8.5 ppmv	< 1 ppmv
Other Hydrocarbons		< 250 ppmv	< 1 ppmv	< 1 ppmv
Hydrogen Fluoride	HF	< 10 ppmv	< 5 ppmv	< 5 ppmv
Isopropyl Alcohol	C₂H₈O	< 20 ppmv	< 1 ppmv	< 1 ppmv

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