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GASES

반도체 산업의 특수 가스 및
일반 산업용 가스 공급

Germain - Pure GeH₄ / GeH₄ Mix

Description

CAS No. 7782-65-2

Applications

Semiconductor Gas

Germane UHP Semi Grade
Characteristic Specification Value Analysis Unit Measured Type Measurement Phase
Chemical Purity 99.999 >99.999 % By Difference Vapour
Hydrogen 50 ND < 0.2 PPM GC-PDD Vapour
Nitrogen 2 ND < 0.2 PPM GC-PDD Vapour
Oxygen / Argon 0.5 ND < 0.2 PPM GC-PDD Vapour
Carbon Monoxide 1 ND < 0.2 PPM GC-PDD Vapour
Methane 1 ND < 0.2 PPM GC-PDD Vapour
Carbon Dioxide 2 ND < 0.2 PPM GC-PDD Vapour
Digermane 20 ND < 1 PPM GC-PDD Vapour
Trigemane 1 ND < 1 PPM GC-PDD Vapour
Chlorogermanes 5 ND < 5 PPM GC-PDD Vapour
Germoxanes 5 ND < 5 PPM GC-PDD Vapour
H₂O 1 ND < 1 PPM Hygrometer Vapour