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GASES

반도체 산업의 특수 가스 및
일반 산업용 가스 공급

C3H6

Description

CAS No. 75-19-4

Applications

Semiconductor Gas

Characteristic Specification Value Analysis Unit Measurement Type Measurement  Phase
H2O 2 < 0.1 ppmv Moisture Analyzer Vapor
CO2 1 < 0.1 ppmv GC Vapor
O2 1 < 0.1 ppmv GC Vapor
N2 5 0.5 ppmv GC Vapor
OHC 90 38.6 ppmv GC Vapor
Ca 5 < 0.3 ppb ICP-MS Vapor
Al 7 < 0.3 ppb ICP-MS Vapor
Cu 3 < 0.1 ppb ICP-MS Vapor
Fe 5 0.5 ppb ICP-MS Vapor
Na 9 < 0.4 ppb ICP-MS Vapor
Mg 1 < 0.3 ppb ICP-MS Vapor
Ni 5 0.2 ppb ICP-MS Vapor
K 5 < 0.3 ppb ICP-MS Vapor
Cr 3 < 0.1 ppb ICP-MS Vapor
Zn 5 < 0.2 ppb ICP-MS Vapor
Mn 3 < 0.1 ppb ICP-MS Vapor