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GASES

반도체 산업의 특수 가스 및
일반 산업용 가스 공급

C4F8

Description

CAS No. 115-25-3

Applications

Semiconductor Gas

Characteristic Specification Value Analysis Unit Measurement Type Measurement  Phase
Purity 99.999 > 99.999 9 v/v% -- --
O2 1 < 0.1 ppmv GC Vapor
N2 2 < 0.2 ppmv GC Vapor
CH4 0.5 < 0.1 ppmv GC Vapor
CO 0.5 < 0.2 ppmv GC Vapor
H2O 1 0.2 ppmv Moisture Analyzer Vapor
OHC 0.5 < 0.5 ppmv GC Vapo
Acidity(as HF) 0.5 < 0.5 ppmv FT-IR Vapor
OFC 4 < 0.5 ppmv GC Vap
HCl 0.5 < 0.5 ppmv FT-IR Vapor
Na 5 < 0.4 ppb ICP-MS Vapor
Fe 10 < 0.2 ppb ICP-MS Vapor
K 5 < 0.3 ppb ICP-MS Vapor
Ca 5 < 0.3 ppb ICP-MS Vapor
Cu 5 < 0.1 ppb ICP-MS Vapor
Al 10 < 0.3 ppb ICP-MS Vapor
Mg 10 < 0.3 ppb ICP-MS Vapor
Zn 10 < 0.2 ppb ICP-MS Vapor