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1, 3 Hexalfluorobutadiene - C₄F₆

Description

Liquefied gas, Toxic, Flammable, N.O.S

Applications

HFB is used for critical dimension dielectric etch applications. Higher SiO2 etch rates can be achieved with better selectivity. HFB is a colorless, odorless, and flammable liquefied gas.

Constituent concentration Specification Actual LDL's
1, 3 Hexafluorobutadiene C₄F₆ 99.99% ≥ 99.99%
Nitrogen N₂ < 40 ppmv 29.2 ppmv < 0.5 ppmv
Oxygen, Argon O₂, Ar < 10 ppmv 7.3 ppmv < 0.5 ppmv
Moisture H₂O < 20 ppmv 3.4 ppmv < 0.2 ppmv
Carbon Dioxide CO₂ < 20 ppmv < 1.1 ppmv < 0.5 ppmv
Other Fluorocarbons < 200 ppmv 8.5 ppmv < 1 ppmv
Other Hydrocarbons < 250 ppmv < 1 ppmv < 1 ppmv
Hydrogen Fluoride HF < 10 ppmv < 5 ppmv < 5 ppmv
Isopropyl Alcohol C₂H₈O < 20 ppmv < 1 ppmv < 1 ppmv