GASES

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Perfluoropropane - Octafluoropropane - C₃F₈

Description

Halocarbon 218 (Perfluoropropane) (C3F8) is a colorless, nonflammable, nontoxic gas which is relatively stable and has a faintly sweet odor. Halocarbon 218 is shipped as a liquefied gas under its Own Vapour pressure (100 psig @ 70˚F)

Applications

Halocarbon 218 is used for plasma etching. The chemical composition of Halocarbon 218 supplies a higher ratio of Fluorine to Carbon than any Of the other Halocarbon gases supplied by Electronic Fluorocarbons LLC.When Halocarbon 218 is exposed to the RF field generated in the etch process, a gas plasma is produced that will etch Silicon Dioxide or Silicon Nitrite with exellent selectivity.

Constituent concentration		Nominal	Actual	LDL's
Octafluoropropane (R218)	C₃F₈	99.99%	≥ 99.99%	LDL's
Nitrogen, Oxygen	N₂, O₂	< 200 ppmv	17.1 ppmv	< 0.5
Carbon Monoxide	CO	< 10 ppmv	< 0.5 ppmv	< 0.5
Carbon Dioxide	CO₂	< 30 ppmv	< 0.5 ppmv	< 0.5
Moisture	H₂O	< 10 ppmv	1.1 ppmv	< 0.2
Other Halocarbons		< 100 ppmv	2.2 ppmv	< 1
Free Fluoride		< 0.1 ppmv	< 0.1 ppmw	< 0.1
Acidity (HF)		< 0.1 ppmv	< 0.1 ppmw	< 0.05

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